Micro / Nano Device Design and Fabrication
The Motorola Nanofabrication Research Facility is a fully functional MEMS/Nano device development cleanroom on the 4” wafer platform. Let us help you take your research device project from design to dicing, to prove the concept, or run batch processes.
Micro / Nano processing capabilities
- Photolithography – ISO 5, Class 100
- Ebeam lithography – ISO 6, Class 1000
- Deposition and Etching – ISO 7, Class 10,000]